
1 OVERVIEW
S1C17705 TECHNICAL MANUAL
Seiko Epson Corporation
1-7
3.3.1 Pad Coordinates
Table 1.
No.
Pad name
X (m)
Y (m)
No.
Pad name
X (m)
Y (m)
1 SEG48/COM0
-2535.0 -2880.5
57 SEG104/SEG88
2880.5 -2558.0
2 SEG49/COM1
-2445.0 -2880.5
58 SEG105/SEG89
2880.5 -2468.0
3 SEG50/COM2
-2355.0 -2880.5
59 SEG106/SEG90
2880.5 -2378.0
4 SEG51/COM3
-2265.0 -2880.5
60 SEG107/SEG91
2880.5 -2288.0
5 SEG52/COM4
-2175.0 -2880.5
61 SEG108/SEG92
2880.5 -2198.0
6 SEG53/COM5
-2085.0 -2880.5
62 SEG109/SEG93
2880.5 -2108.0
7 SEG54/COM6
-1995.0 -2880.5
63 SEG110/SEG94
2880.5 -2018.0
8 SEG55/COM7
-1905.0 -2880.5
64 SEG111/SEG95
2880.5 -1928.0
9 SEG56/COM8
-1815.0 -2880.5
65 SEG112/SEG96
2880.5 -1838.0
10 SEG57/COM9
-1725.0 -2880.5
66 SEG113/SEG97
2880.5 -1748.0
11 SEG58/COM10
-1635.0 -2880.5
67 SEG114/SEG98
2880.5 -1658.0
12 SEG59/COM11
-1545.0 -2880.5
68 SEG115/SEG99
2880.5 -1568.0
13 SEG60/COM12
-1455.0 -2880.5
69 SEG116/SEG100
2880.5 -1478.0
14 SEG61/COM13
-1365.0 -2880.5
70 SEG117/SEG101
2880.5 -1388.0
15 SEG62/COM14
-1275.0 -2880.5
71 SEG118/SEG102
2880.5 -1298.0
16 SEG63/COM15
-1185.0 -2880.5
72 SEG119/SEG103
2880.5 -1208.0
17 SEG64/COM16
-1095.0 -2880.5
73 SEG120/SEG104
2880.5 -1118.0
18 SEG65/COM17
-1005.0 -2880.5
74 SEG121/SEG105
2880.5 -1028.0
19 SEG66/COM18
-915.0 -2880.5
75 SEG122/SEG106
2880.5 -938.0
20 SEG67/COM19
-825.0 -2880.5
76 SEG123/SEG107
2880.5 -848.0
21 SEG68/COM20
-735.0 -2880.5
77 SEG124/SEG108
2880.5 -758.0
22 SEG69/COM21
-645.0 -2880.5
78 SEG125/SEG109
2880.5 -668.0
23 SEG70/COM22
-555.0 -2880.5
79 SEG126/SEG110
2880.5 -578.0
24 SEG71/COM23
-465.0 -2880.5
80 SEG127/SEG111
2880.5 -488.0
25 SEG72/COM24
-375.0 -2880.5
81 COM31/SEG112
2880.5 -388.0
26 SEG73/COM25
-285.0 -2880.5
82 COM30/SEG113
2880.5 -298.0
27 SEG74/COM26
-195.0 -2880.5
83 COM29/SEG114
2880.5 -208.0
28 SEG75/COM27
-105.0 -2880.5
84 COM28/SEG115
2880.5 -118.0
29 SEG76/COM28
-15.0 -2880.5
85 COM27/SEG116
2880.5
-28.0
30 SEG77/COM29
75.0 -2880.5
86 COM26/SEG117
2880.5
62.0
31 SEG78/COM30
165.0 -2880.5
87 COM25/SEG118
2880.5
152.0
32 SEG79/COM31
255.0 -2880.5
88 COM24/SEG119
2880.5
242.0
33 SEG80/SEG64
375.0 -2880.5
89 COM23/SEG120
2880.5
332.0
34 SEG81/SEG65
465.0 -2880.5
90 COM22/SEG121
2880.5
422.0
35 SEG82/SEG66
555.0 -2880.5
91 COM21/SEG122
2880.5
512.0
36 SEG83/SEG67
645.0 -2880.5
92 COM20/SEG123
2880.5
602.0
37 SEG84/SEG68
735.0 -2880.5
93 COM19/SEG124
2880.5
692.0
38 SEG85/SEG69
825.0 -2880.5
94 COM18/SEG125
2880.5
782.0
39 SEG86/SEG70
915.0 -2880.5
95 COM17/SEG126
2880.5
872.0
40 SEG87/SEG71
1005.0 -2880.5
96 COM16/SEG127
2880.5
962.0
41 SEG88/SEG72
1095.0 -2880.5
97 VSS
2880.5 1142.5
42 SEG89/SEG73
1185.0 -2880.5
98 TEST3
2880.5 1232.5
43 SEG90/SEG74
1275.0 -2880.5
99 TEST2
2880.5 1322.5
44 SEG91/SEG75
1365.0 -2880.5
100 TEST1
2880.5 1412.5
45 SEG92/SEG76
1455.0 -2880.5
101 VD2
2880.5 1502.5
46 SEG93/SEG77
1545.0 -2880.5
102 CG
2880.5 1592.5
47 SEG94/SEG78
1635.0 -2880.5
103 CF
2880.5 1682.5
48 SEG95/SEG79
1725.0 -2880.5
104 CE
2880.5 1772.5
49 SEG96/SEG80
1815.0 -2880.5
105 CD
2880.5 1862.5
50 SEG97/SEG81
1905.0 -2880.5
106 CC
2880.5 1952.5
51 SEG98/SEG82
1995.0 -2880.5
107 CB
2880.5 2042.5
52 SEG99/SEG83
2085.0 -2880.5
108 CA
2880.5 2132.5
53 SEG100/SEG84
2175.0 -2880.5
109 VC5
2880.5 2222.5
54 SEG101/SEG85
2265.0 -2880.5
110 VC4
2880.5 2312.5
55 SEG102/SEG86
2355.0 -2880.5
111 VC3
2880.5 2402.5
56 SEG103/SEG87
2445.0 -2880.5
112 VC2
2880.5 2492.5
113 VC1
2880.5 2582.5