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參數(shù)資料
| 型號(hào)： | C7460 |
| 廠商： | Hamamatsu Photonics |
| 英文描述： | Multiband Plasma-Process Monitor |
| 中文描述： | 多波段等離子體進(jìn)程監(jiān)視器 |
| 文件頁(yè)數(shù)： | 4/8頁(yè) |
| 文件大?。?/td> | 524K |
| 代理商： | C7460 |
FUNCTIONS OF HARDWARE
G
Measurement Parameter Setting
Measurement interval
Exposure time: 20 to 32767 ms
Data accumulation: 1 to 32767 spectra
Sensor sensitivity: 3 settings (1x, 2x, 5x)
Wavelength smoothing: on/off
Width for wavelength smoothing: any integer value within 1 to 50 nm
Time smoothing (rolling average): on/off
Filter for time smoothing: any value within 0 to 100 %
Trigger : measurement start trigger
G
Measurement Script
Scripts contain measurement conditions as well as formula and
judgments applied to the data. Results of script processing can be
output via the software and via the analog BNC terminal in real-
time. Each etch process will be treated by a tailored script.
The maximum number of scripts the MPM can store internally is
100, and one of them is selected as the active one. Each script can
contain the definition of up to 32 formulas. All script processing is
perfomed inside the MPM and in real-time.
G
Script Formula
Script fomula can be defined to perform math operations between
spectral intensities. Besides the four basic algebraic functions, it is
also possible to compute smoothing, differentials as well as the
special spectral patterns applied for endpoint and fault detection
(see section on U8851 in this brochure).
G
Judgments
Judgments are used to detect endpoint or fault conditions. They
are defined by thresholds applied to formula, and they can be
chained and combined by logical operators.
SPECIFICATIONS
DIMENSIONAL OUTLINE (Unit: mm)
G
Main Unit (weight: approx.7kg)
G
Fiber Input Optics (weight: approx.100g)
C7460
RS-232C
1
2
3
4
5
1
2
262
±
1
POWER
200
±
1
6
±
1
9
±
1
3
±
0.5
25
±
1
325
±
1
383
±
1
40
50
3000
7
0.95
Input side
To main unit
Easy Measurement using Optical Fiber
4
Fiber aperture (N.A.) 0.2
Bundle length 3 m
200 to 950 nm (Measuring range)
235 to 950 nm (Sensitivity-corrected range)
< 2 nm
16 bit
2 outputs
BNC; 0 to 10 V
5 outputs (3 outputs for External Trigger)
BNC; TTL; High impedance
BNC; TTL; High impedance
BNC; TTL; High impedance;
pulse width: min. 40 ms
IEEE 802.3 (10BaseT); 10 Mbit/s
RJ45 modular connector
A/D resolution
Analog signal output result
of formula calculation
Script output result of
judgment calculation
Busy output
Start input
RS-232
TCP/IP (for Ethernet only)
AC 100 / 117 / 220 / 240 V
±
10%; 50 / 60 Hz
90 VA
Power consumption
Fiber input optics
Bundle diameter inner: 1 mm; outer: 7 mm
Wavelength range
Wavelength resolution
Interfaces
Ethernet
Serial
Interface protocol
Line voltage
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