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參數(shù)資料
| 型號： | C7460 |
| 廠商： | Hamamatsu Photonics |
| 英文描述： | Multiband Plasma-Process Monitor |
| 中文描述： | 多波段等離子體進程監(jiān)視器 |
| 文件頁數(shù)： | 2/8頁 |
| 文件大小： | 524K |
| 代理商： | C7460 |
BACKGROUND
G
Highly Accurate and Reliable
The MPM employs a high-resolution compact spec-
trograph and a highly sensitive detector which diag-
nose plasma with elevated levels of precision.
Along with these superior photometric characteris-
tics, the MPM is compact, sturdy and offers the high
standards of reliability that are required in a manu-
facturing environment.
G
Easy to Operate
The MPM is equipped with a sturdy fiber optic bun-
dle, which can conveniently be combined with the
plasma chamber. Due to this, and due to its easy-to
use software, the MPM is easy to setup and operate.
G
Intelligent Sensor System
The MPM is not just a spectrograph. It also contains in-
ternal data processing capabilities which allow to ex-
tract and compress the relevant infomation from the
data.
STANDARD CONFIGURATION
Fiber input optics
Main unit
MPM Standard Configuration
Ethernet (TCP/IP)
Computer
C7460
RS-232C
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POWER
Windows 98, NT, 2000
U9046 Plasma Process Data Aquisition Software
PLASMA ETCHING
SPUTTERING
CONFIGURATION OF APC WITH MPM (EXAMPLE)
C7460
RS-232C
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5
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2
POWER
C7460
RS-232C
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5
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2
POWER
C7460
RS-232C
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2
3
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5
1
2
POWER
C7460
RS-232C
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5
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POWER
Optical fiber
Script output (end point, plasma fault status, etc)
HUB
Ethernet
E
MPM
Ethernet
2
Real-Time Plasma Monitoring
FEATURES
Up to 60 percent of the time that a piece of semi-
conductor manufacturing equipment spends in oper-
ation is generally for non productive jobs like plas-
ma cleanup, chamber stabilization (seasoning) and
system diagnosis. Typical approaches for reducing
down-time and repetitive processes like these are to
utilize Advanced Process Control (APC) and Sensor
Based Process Control (SBPC) technologies with
factory LAN services. The MPM allows you to gain
full control over processes using information provi-
ded by the MPM regarding plasma spectra, etching
end-point detection status, plasma fault status, etc.
The MPM opens the possibility of significantly in-
creasing the efficiency of manufacturing equipment.
G
Easy Fab Integration
The MPM is equipped with several interfaces in-
cluding Ethernet and a TCP/IP protocol stack. To-
gether with its very verstile software framework this
allows the easy integration into existing fab IT infra-
structure.
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