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參數(shù)資料
| 型號(hào)： | C7460 |
| 廠商： | Hamamatsu Photonics |
| 英文描述： | Multiband Plasma-Process Monitor |
| 中文描述： | 多波段等離子體進(jìn)程監(jiān)視器 |
| 文件頁(yè)數(shù)： | 5/8頁(yè) |
| 文件大小： | 524K |
| 代理商： | C7460 |
The U9046 is a software which allows to control up to 4 units
of C7460 multiband plasma process monitor simultaneously
and observe the spectrum of plasma emission during plasma
processes. The observed spectrum data are stored in the
database automatically and can be analyzed. The highly
sensitive end-point detection software U8851 is an option. And
also the fault detection software for Advanced Process Control
will be available.
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Up to 4 units of C7460 can be controlled simultaneously,
and all of the spectrum data during plasma process can be
observed.
Database oriented data storage is available and a fast SQL
based data access is allowed.
The various ways to trigger the measurement are prepared.
The drivers to communicate to the plasma chambers or
factory network can be optionally provided.
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Control Station
Control Station allows to control C7460s and observe the
spectrum data. The measurement can be triggered by the trigger
signal from the plasma chamber and also by the optical trigger.
The measurement can be repeated automatically during the
several wafers' process.
Database
The spectrum data observed by the Control Station are stored into
the SQL compatible Database.
Watchdog
The Watchdog software component always monitors the condition
of the software, and an error will be reported by an e-mail.
Logging
The Logging component records the history of the software jobs in
a file.
Drivers for the Plasma Chambers
The Drivers software can be provided to make communication to
the plasma chambers or factory network. The Drivers can obtain
the information about the process like Process ID and Lot No. and
so on. Such information can be stored with the observed spectrum
data into the Database. Such a driver is needed typically for
endpoint and automatic fault detection installations.
Easy Graphical User Interfaces
The graphical user interfaces (GUIs) used by the process
engineer and by the operators are different and dedicated to their
respective tasks. Specifically, the operators' GUI is very easy to
use, minimizing the risk of human errors.
U9046 consists of several software components to perform the
measurement in real time with great flexibility.
Drivers
Watchdog
Logging
Communication Layer
Database
Control Station
MPM C7460
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U9046
OUTLINE
Standard Software
FEATURES
SOFTWARE ARCHITECTURE
Plasma Process Data Acquisition Software
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相關(guān)PDF資料 |
PDF描述 |
|---|---|
| C7473-36 | Photonic Multichannel Spectral Analyzer Model: PMA-11 |
| c74ac244 | OCTAL BUFFER/LINE DRIVER WITH 3-STATE OUTPUTS |
| c74ac244 | OCTAL BUFFER/LINE DRIVER WITH 3-STATE OUTPUTS |
| C7500-50 | Near Infrared 1/2-inch CCD Video Camera |
| C7500-51 | Near Infrared 1/2-inch CCD Video Camera |
相關(guān)代理商/技術(shù)參數(shù) |
參數(shù)描述 |
|---|---|
| C7470RJR | 功能描述:線繞電阻器 - 透孔 C7 470R 5% REELED RoHS:否 制造商:Bourns 電阻:10 Ohms 容差:5 % 功率額定值:7 W 溫度系數(shù):200 PPM / C 系列:FW 端接類(lèi)型:Axial 工作溫度范圍:- 55 C to + 155 C 尺寸:9.5 mm Dia. x 26 mm L 封裝:Ammo 產(chǎn)品:Power Resistors Wirewound High Energy |
| C7470RJT | 功能描述:線繞電阻器 - 透孔 RoHS:否 制造商:Bourns 電阻:10 Ohms 容差:5 % 功率額定值:7 W 溫度系數(shù):200 PPM / C 系列:FW 端接類(lèi)型:Axial 工作溫度范圍:- 55 C to + 155 C 尺寸:9.5 mm Dia. x 26 mm L 封裝:Ammo 產(chǎn)品:Power Resistors Wirewound High Energy |
| C7473-36 | 制造商:HAMAMATSU 制造商全稱(chēng):Hamamatsu Corporation 功能描述:Photonic Multichannel Spectral Analyzer Model: PMA-11 |
| C74757-000 | 制造商:TE Connectivity 功能描述:C74757-000 制造商:TE Connectivity 功能描述:202G632-780-0 - Bulk |
| C747-7/8B | 制造商:Thomas & Betts 功能描述:ADJ. BEAM ATTACHMENT |
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