- 您現(xiàn)在的位置：買賣IC網(wǎng) > PDF目錄379721 > C7460 (Hamamatsu Photonics) Multiband Plasma-Process Monitor PDF資料下載
參數(shù)資料
| 型號(hào)： | C7460 |
| 廠商： | Hamamatsu Photonics |
| 英文描述： | Multiband Plasma-Process Monitor |
| 中文描述： | 多波段等離子體進(jìn)程監(jiān)視器 |
| 文件頁(yè)數(shù)： | 7/8頁(yè) |
| 文件大?。?/td> | 524K |
| 代理商： | C7460 |
Fig. 3 Example of an analysis display
(a) : An operation formula is set up.
(b) : An operation result is displayed.
(c) : Graph of wafer number pair terminal point time is displayed.
The C8066 is an optical attenuator for the Multiband Plasma-
Process Monitor C7460. It is possible to change the light
intensity in five steps (1, 1/10, 1/100, 1/1000, 1/10000) by the
button on the front panel or via RS-232C interface.
The optimum light intensity for monitoring the plasma
emission can thus be obtained.
1
The data recorded by the Multiband Plasma-Process Monitor
C7460 of the changes in the passage of time of the spectrum is
loaded onto the End-point Synthesis Tool U8851.
2
With the analysis function of the U8851, the spectrum data,
which constantly changes, analyzes what kinds of spectrum
patterns are shown by addition, and how each spectrum pattern
is carrying out time changes.
In Fig. 1 the measured data D (l, t) shows that three spectrum
patterns (S
1
[l] to S
3
[l]) are mainly shown with the superposition
of data which carried out time changes like T
1
(t) to T
3
(t),
respectively focusing on the average spectrum.
3
The U8851 can perform end-point detection of a process from
spectrum pattern changes obtained in the analysis of
2
with
changes in the passage of time.
It specifies which spectrum pattern can be utilized for end-point
detection with changes in the passage of time and smoothes and
differentiates waveforms according to changes in the passage of
time to detect an end-point.
Moreover, analysis of
2
and
3
can be simultaneously
performed on two or more wafers, and the detected end-point
time is displayed on a graph.
While verifying an end-point detection with these functions, the
stability of a process can also be evaluated. (Fig.3)
4
The detection operation formula of the acquired end points as
mentioned above, can be saved in a file and downloaded into the
C7460 as well.
In the C7460, end-point detection like in
3
is performed in real
time.
OUTLINE
(a)
(b)
(c)
7
End-point Synthesis Tool U8851
Optional Software
Optional Hardware
Optical Attenuator C8066
相關(guān)PDF資料 |
PDF描述 |
|---|---|
| C7473-36 | Photonic Multichannel Spectral Analyzer Model: PMA-11 |
| c74ac244 | OCTAL BUFFER/LINE DRIVER WITH 3-STATE OUTPUTS |
| c74ac244 | OCTAL BUFFER/LINE DRIVER WITH 3-STATE OUTPUTS |
| C7500-50 | Near Infrared 1/2-inch CCD Video Camera |
| C7500-51 | Near Infrared 1/2-inch CCD Video Camera |
相關(guān)代理商/技術(shù)參數(shù) |
參數(shù)描述 |
|---|---|
| C7470RJR | 功能描述:線繞電阻器 - 透孔 C7 470R 5% REELED RoHS:否 制造商:Bourns 電阻:10 Ohms 容差:5 % 功率額定值:7 W 溫度系數(shù):200 PPM / C 系列:FW 端接類型:Axial 工作溫度范圍:- 55 C to + 155 C 尺寸:9.5 mm Dia. x 26 mm L 封裝:Ammo 產(chǎn)品:Power Resistors Wirewound High Energy |
| C7470RJT | 功能描述:線繞電阻器 - 透孔 RoHS:否 制造商:Bourns 電阻:10 Ohms 容差:5 % 功率額定值:7 W 溫度系數(shù):200 PPM / C 系列:FW 端接類型:Axial 工作溫度范圍:- 55 C to + 155 C 尺寸:9.5 mm Dia. x 26 mm L 封裝:Ammo 產(chǎn)品:Power Resistors Wirewound High Energy |
| C7473-36 | 制造商:HAMAMATSU 制造商全稱:Hamamatsu Corporation 功能描述:Photonic Multichannel Spectral Analyzer Model: PMA-11 |
| C74757-000 | 制造商:TE Connectivity 功能描述:C74757-000 制造商:TE Connectivity 功能描述:202G632-780-0 - Bulk |
| C747-7/8B | 制造商:Thomas & Betts 功能描述:ADJ. BEAM ATTACHMENT |
發(fā)布緊急采購(gòu)，3分鐘左右您將得到回復(fù)。