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Motorola Sensor Device Data
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The MPX12 series device is a silicon piezoresistive pressure sensor providing a very
accurate and linear voltage output — directly proportional to the applied pressure. This
standard, low cost, uncompensated sensor permits manufacturers to design and add
their own external temperature compensating and signal conditioning networks.
Compensation techniques are simplified because of the predictability of Motorola’s single
element strain gauge design.
Features
Low Cost
Patented Silicon Shear Stress Strain Gauge Design
Ratiometric to Supply Voltage
Easy to Use Chip Carrier Package Options
Differential and Gauge Options
Durable Epoxy Package
Application Examples
Air Movement Control
Environmental Control Systems
Level Indicators
Leak Detection
Medical Instrumentation
Industrial Controls
Pneumatic Control Systems
Robotics
Figure 1 shows a schematic of the internal circuitry on the stand–alone pressure
sensor chip.
Figure 1. Uncompensated Pressure Sensor Schematic
PIN 3
SENSING
ELEMENT
PIN 2
PIN 4
+ Vout
– Vout
+ VS
PIN 1
VOLTAGE OUTPUT versus APPLIED DIFFERENTIAL PRESSURE
The output voltage of the differential or gauge sensor increases with increasing
pressure applied to the pressure side (P1) relative to the vacuum side (P2). Similarly,
output voltage increases as increasing vacuum is applied to the vacuum side (P2)
relative to the pressure side (P1).
SEMICONDUCTOR TECHNICAL DATA
0 to 10 kPa (0–1.45 psi)
55 mV FULL SCALE SPAN
(TYPICAL)
PIN NUMBER
MPX12D
CASE 344
MPX12DP
CASE 344C
1
2
Gnd
+Vout
3
4
VS
–Vout
NOTE: Pin 1 is noted by the notch in
the lead.
REV 3
F
Freescale Semiconductor, Inc.
n
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