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| 型號(hào)： | FEDSM2000-11043 |
| 廠商： | Electronic Theatre Controls, Inc. |
| 英文描述： | DUAL EMISSION LASER INDUCED FLUORESCENCE TECHNIQUE (DELIF) FOR OIL FILM THICKNESS AND TEMPERATURE MEASUREMENT |
| 中文描述： | 雙發(fā)射激光誘導(dǎo)熒光技術(shù)（DELIF）的油膜厚度和溫度測量 |
| 文件頁數(shù)： | 8/8頁 |
| 文件大?。?/td> | 190K |
| 代理商： | FEDSM2000-11043 |
8
Copyright 2000 by ASME
Temperature
0
5000
10000
15000
20000
25000
30000
10
12
14
16
18
20
Thickness (micrometers)
R
I
Pyr 567
Rhod 640
Ratio
Figure 11: DELIF for temperature measurement
SUMMARY AND CONCLUSIONS
The bases for a two-dye Dual Emission Laser Induced
Fluorescence (DELIF) technique for film thickness and
temperature measurement were presented along with the basic
equations relating these scalar measurements to dye
characteristics and illumination intensity. Shown is that the
non-linearity resulting from emission reabsorption, while
detrimental to measurement of temperature, can be used to
accurately quantify film thickness. Experimental measurements
using Pyrromethene 567, Pyrromethene 650, and Rhodamine
640 demonstrate the feasibility of this technique at accurately
eliminating variations in illumination intensity to extract scalar
information.
REFERENCES
Coppeta, J., Rogers, C., Philipossian, A., Kaufman, F. B.,
1997, “Characterizing Slurry Flow During CMP Using Laser
Induced
Fluorescence”,
Second
Mechanical
Polish
Planarization
Interconnection Conference, Santa Clara, CA, February 1997.
Coppeta, J., Rogers, C., 1998, “Dual Emission Laser
Induced Fluorescence for Direct Planar Scalar Behavior
Measurements”, Experiments in Fluids, Volume 25, Issue 1, pp.
1-15.
Haugland, R. P., 1999, “Handbook of Fluorescent Probes
and Research Chemical”, Seventh Edition, Molecular Probes.
Poll, G., Gabelli, A., Binnington, P. G., Qu, J., 1992,
“Dynamic Mapping of Rotary Lip Seal Lubricant Films by
Fluorescent Image Processing”, Proceedings, 13
th
International
Conference on Fluid Sealing, B. S. Nau, ed., BHRA.
Sakakibara, J., Adrian, R. J., 1999, “Whole Field
Measurement of Temperature in Water Using Two-Color Laser
Induced Fluorescence”, Experiments in Fluids, Volume 26,
Issue 1/2, pp. 7-15.
International
for ULSI Multilevel
Chemical
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