參數(shù)資料
型號: TSC87251G2D-L16CED
廠商: ATMEL CORP
元件分類: 微控制器/微處理器
英文描述: B/16-BIT MICROCONTROLLER WITH SERIAL COMMUNICATION INTERFACES
中文描述: 16-BIT, OTPROM, 16 MHz, MICROCONTROLLER, PQFP44
封裝: 10 X 10 MM, PLASTIC, VQFP-44
文件頁數(shù): 21/28頁
文件大小: 153K
代理商: TSC87251G2D-L16CED
Qualpack TSC87251G2D
Rev. 0 – October 1999
21
Comments:
No reject observed during package qualification tests.
One reject in LFR, but physical analysis demonstrated the failure was wafer process dependant and not
related to the device itself. As a consequence it was not charged for device qualification.
3.5.1 Failure Mechanisms and Corrective Actions
As part of TEMIC continuous improvement policy, all defects are analysed. For all failure mechanisms
identified, root causes ranked regards number of occurencies and criticity are investigated and
addressed by corrective actions.
Failure
Mechanism
56% Contacts
misalignment
Root Cause
Corrective Action
Date
Effect
Check of
Efficiency
Visual inspection,
yield - 07/99
RTA drift
Upgrade of RTA
equipment
06/99
reduce alignment
scattering
26% Poly defects
Defect
density at
Poly level
# Hard mask :
replacement of PR
Titane mask by masking
buffers during Ti
deposition for
# polysilicideBARC
(Bottom Anti-Reflective
Coating)
# PR strip optimization
10/98
03/99
Reduction of
defect density at
Poly level
Improve Poly
dimension control
Defect density
reduction
Yield
EFR - 12/98
Yield
EFR - 12/98
EFR - 05/99
6% Metal particles
PR strip
process
# PR strip method
optimized
# Equipment upgrade
(Semitool)
03/99
07/99
Reduction of the
defect density
Yield – EFR 05/99
6% Passivation
Marginal
6% Silicon
breakdown
Marginal
3.5.2 Qualification status
The 0.5um logic wafer process was qualified on 1997 September. The qualification was extended to
OTP microcontrollers (SCMOS3 NV) process on 1999 April.
The TSC83251G2D was qualified on 1999 January, and OTP version TSC87251G2D was full qualified
on 1999 April.
相關PDF資料
PDF描述
TSC87251G2D-L16CB B/16-BIT MICROCONTROLLER WITH SERIAL COMMUNICATION INTERFACES
TSC83251G2D-L16CB B/16-BIT MICROCONTROLLER WITH SERIAL COMMUNICATION INTERFACES
TSC83251G2D-L16CED B/16-BIT MICROCONTROLLER WITH SERIAL COMMUNICATION INTERFACES
TSC87251G2D B/16-BIT MICROCONTROLLER WITH SERIAL COMMUNICATION INTERFACES
TSC87251G2D-16CB B/16-BIT MICROCONTROLLER WITH SERIAL COMMUNICATION INTERFACES
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