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參數(shù)資料
| 型號： | S10043 |
| 元件分類： | 光敏二極管 |
| 英文描述： | PHOTO DIODE |
| 封裝： | CERAMIC PACKAGE-2 |
| 文件頁數(shù)： | 1/2頁 |
| 文件大?。?/td> | 45K |
| 代理商： | S10043 |
PHOTODIODE
Si photodiode
Highly reliable photodiode for VUV detection
S10043
S10043 is a Si photodiode designed to detect high-power ArF excimer lasers (193 nm) with high accuracy and stability. By combining our
newly developed technologies for forming ultra-thin PN junctions and high-reliability ultra-thin metal films, S10043 shows almost no change
in sensitivity even after exposure to ArF excimer laser beam of 1 kJ/cm2.
Features
Applications
l Greatly improved sensitivity stability even after exposure
to ArF (
λ=193 nm) excimer laser
l Windowless package *1
l ArF excimer laser detection
l Various UV detection
1
s Absolute maximum ratings (Ta=25 °C)
Parameter
Symbol
Value
Unit
Reverse voltage
VR Max.
5
V
Operating temperature *
2
Topr
-20 to +60
°C
Storage temperature *
2
Tstg
-55 to +80
°C
s Electrical and optical characteristics (Ta=25 °C)
Parameter
Symbol
Condition
Min.
Typ.
Max.
Unit
Spectral response range
λ
-
190 to 1000
-
nm
Peak sensitivity wavelength
λp
-
720
-
nm
Photo sensitivity
S
λ=193 nm
10
15
-
mA/W
Dark current
ID
VR=10 mV
-
0.1
1
nA
Terminal capacitance
Ct
VR=0 V, f=10 kHz
-
4
-
nF
Rise time
tr
VR=0 V, RL=1 k
10 to 90 %
-
9
-
s
*1: S10043 uses a windowless package with no protection on the photodiode chip, and is shipped with the package held with
glass tape. Remove the glass tape when using.
*2: No condensation
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