
3–145
Motorola Sensor Device Data
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Motorola’s MPXAZ6115A series sensor integrates on–chip, bipolar op amp circuitry
and thin film resistor networks to provide a high output signal and temperature
compensation. The small form factor and high reliability of on–chip integration make the
Motorola pressure sensor a logical and economical choice for the system designer.
The MPXAZ6115A series piezoresistive transducer is a state–of–the–art, monolithic,
signal conditioned, silicon pressure sensor. This sensor combines advanced
micromachining techniques, thin film metallization, and bipolar semiconductor processing
to provide an accurate, high level analog output signal that is proportional to applied
pressure.
Figure 1 shows a block diagram of the internal circuitry integrated on a pressure
sensor chip.
Features
Resistant to High Humidity and Common Automotive Media
Improved Accuracy at High Temperature
1.5% Maximum Error over 0
°
to 85
°
C
Ideally suited for Microprocessor or Microcontroller–Based Systems
Temperature Compensated from –40
°
to +125
°
C
Durable Thermoplastic (PPS) Surface Mount Package
Application Examples
Aviation Altimeters
Industrial Controls
Engine Control/Manifold Absolute Pressure (MAP)
Weather Station and Weather Reporting Devices
Figure 1. Fully Integrated Pressure Sensor
Schematic
VS
SENSING
ELEMENT
Vout
GND
THIN FILM
TEMPERATURE
COMPENSATION
AND
GAIN STAGE #1
GAIN STAGE #2
AND
GROUND
REFERENCE
SHIFT CIRCUITRY
PINS 1, 5, 6, 7 AND 8 ARE NO CONNECTS
SEMICONDUCTOR TECHNICAL DATA
5
6
7
8
N/C
VS
Gnd
Vout
N/C
N/C
N/C
INTEGRATED
PRESSURE SENSOR
15 to 115 kPa (2.2 to 16.7 psi)
0.2 to 4.8 Volts Output
PIN NUMBER
NOTE: Pins 1, 5, 6, 7, and 8 are internal
device connections. Do not connect to
external circuitry or ground. Pin 1 is
denoted by the notch in the lead.
1
2
3
MPXAZ6115A6U
CASE 482
MPXAZ6115AC6U
CASE 482A
4
N/C
SMALL OUTLINE PACKAGE
REV 0
F
Freescale Semiconductor, Inc.
n
.