參數(shù)資料
型號(hào): LIS3L02AQ
廠商: STMICROELECTRONICS
元件分類: 模擬信號(hào)調(diào)理
英文描述: SPECIALTY ANALOG CIRCUIT, QCC44
封裝: 7 X 7 MM, 1.80 MM HEIGHT, PLASTIC, QFN-44
文件頁數(shù): 5/9頁
文件大?。?/td> 177K
代理商: LIS3L02AQ
Obsolete
Product(s)
- Obsolete
Product(s)
5/9
LIS3L02AQ
3
FUNCTIONALITY
The LIS3L02AQ is a low-cost, low-power, analog output three-axis linear accelerometer packaged in QFN pack-
age. The complete device includes a sensing element and an IC interface able to take the information from the
sensing element and to provide an analog signal to the external world.
3.1 Sensing element
The THELMA process is utilized to create a surface micro-machined accelerometer. The technology allows to
carry out suspended silicon structures which are attached to the substrate in a few points called anchors and
free to move on a plane parallel to the substrate itself. To be compatible with the traditional packaging tech-
niques a cap is placed on top of the sensing element to avoid blocking the moving parts during the molding
phase.
The equivalent circuit for the sensing element is shown in the figure below; when a linear acceleration is applied,
the proof mass displaces from its nominal position, causing an imbalance in the capacitive half-bridge. This im-
balance is measured using charge integration in response to a voltage pulse applied to the sense capacitor.
Figure 4. Equivalent electrical circuit
Cs1x
Cs2x
Cps1
Cps2
Cpr
Rs2
Rs1
Rr
S1x
rot
S2x
Cs1y
Cs2y
Cps1
Cps2
Cpr
Rs2
Rs1
Rr
S1y
S2y
Cs1z
Cs2z
Cps1
Cps2
Cpr
Rs2
Rs1
Rr
S1z
S2z
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