參數(shù)資料
型號(hào): HSH3500PILO
廠商: PerkinElmer Inc.
英文描述: Lamps for Photolithography
中文描述: 燈的光刻
文件頁數(shù): 2/2頁
文件大?。?/td> 44K
代理商: HSH3500PILO
PerkinElmer welcomes inquiries about special lamps. We would be pleased to discuss the requirements of your application and the feasibility of
designing a lamp specifically suited to your needs.
For more information e-mail us at opto@perkinelmer.com or visit our web site at www.perkinelmer.com/opto.
All values are nominal; specifications subject to change without notice.
2000 PerkinElmer inc. All rights reserved.
.
www.perkinelmer.com/opto
USA:
PerkinElmer Optoelectronics
44370 Christy St.
Fremont, CA 94538
Phone: (510) 979-6500
Fax: (510) 687-1140
Europe:
PerkinElmer Optoelectronics GmbH
Wenzel-Jaksch-Str. 31
65199 Wiesbaden
Germany
Phone: +49 611 492 0
Fax: +49 611 492 177
Asia:
PerkinElmer Optoelectronics
47 Ayer Rajah Crescent #06-12
Singapore 139947
Phone: +65 775 2022
Fax: +65 775 1008
Description
Power
Current
Voltage
Current Ripple
Temperature
(at base)
Lifetime
Nominal
3500 watts
152 amps (DC)
23 volts (DC)
3%
220oC (max)
1500 hours
Range
135-175 amps (DC)
20-26 volts (DC)
Operational Specifications
HSH3500PILO
Physical Specifications
Description
Arc Gap
Anode Base
Cathode Base
Specification
4.5 mm (max)
40 mm Dia (M6)
32.5 mm Dia (M12)
Typical Performance Graph
Notes
1.
Lamp must be operated with anode end up and
cathode end down. Inclination of lamp axis to verti-
cal must not exceed 10o.
Dimensions
324
Max
155.5
81.5
Spectral Output
ANODE (+)
END UP
CATHODE (-)
END DOWN
Part Number References
Used In
Replaces
0
10
20
30
40
50
60
70
80
90
100
0
200
400
600
800
1000
1200
1400
Hours of Operation
R
Wavelength (nm)
R
ASML 5500 / 200B, /250C
SUV-3500-PIL
HBO-3500-W/PI
0
10
20
30
40
50
60
70
80
90
100
250
300
350
400
450
500
550
600
650
700
750
All dimensions are in millimeters.
DS-193 Rev C 1101
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PDF描述
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