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參數(shù)資料
| 型號： | FC262 |
| 廠商： | Electronic Theatre Controls, Inc. |
| 英文描述： | Mass Flow Controllers and Flowmeters |
| 中文描述： | 質(zhì)量流量控制器和流量計 |
| 文件頁數(shù)： | 3/3頁 |
| 文件大小： | 151K |
| 代理商： | FC262 |
3
Tylan FC260/FM360 MFCs and Flowmeters - Ordering Information
Performance
Gases
Step Response Time
Any gas with a known conversion factor
6 seconds (dependent on step request and conditions)
± 1% of full scale
± 2% of full scale for the FC262
0.5% of full scale
± 0.2% of full scale
Not sensitive
50:1 (100% - 2%)
FC262 50:2 (100% - 4%)
Accuracy
Linearity
Repeatability
Attitude Sensitivity
Control Range
Mechanical
Materials
Type 316 Stainless Steel, Viton
, Kalrez
, or
Neoprene Seals depending on gas application
1 x 10
-9
atm cc/sec He
Leak Integrity
Electrical
Analog Output
0 - 5 VDC (5 volts = full scale)
Flow Controllers:
+ 15 VDC ± 4%, 25 mA max
- 15 VDC ± 4%, 180 mA max
Flow Meters:
+ 15 VDC ± 4%, 25 mA max
- 15 VDC ± 4%, 25 mA max
Flow Controllers:
4.0 watts maximum
Flow Meters:
1.5 watts maximum
Flow Controllers:
0 - 5 VDC (2.5 k ohms max source impedance)
40-20 mA optional (contact Mykrolis)
Input Power
Power Consumption
Command Signal
Minimum Load
Resistance
Environmental
Temperature Range
Temperature
Coefficient
Pressure Coefficient
Note: In accordance with SEMI Standard E12-91, Standard Temperature is 0° C
and Standard Pressure is 760 mm Hg (14.7 psia).
2000 ohms
5 - 43° C (40 - 110° F)
± 0.1%/° C
± 0.007%/psi
Model
Ordering Information
Flow Controllers
FC260
FC261
FC262
Flow Meters
FM360
FM361
FM362
Fitting
2S = 1/8” Swagelok
4S = 1/4” Swagelok
4VC0 = 1/4” VCO
4V = 1/4” VCR
6S = 3/8” Swagelok
6VC0 = 3/8” VCO
6V = 3/8” VCR
Full Scale Flow*
Gas
Flow Controllers
Flow Meters
Model
FC260
FC261
FC262
FC360
FC361
FC362
Full Scale
Range
10 sccm - 5 slm
6 - 20 slm
30 - 200 slm
10 sccm - 5 slm
6 - 20 slm
30 - 200 slm
Pressure
Drop
10 - 40 psid
15 - 40 psid
20 - 40 psid
0.5 psid at full scale flow
Gas Pressure
30 psig optimum
150 psid max
40 psig
optimum
150 psid
max
500 psid max
Gas Fittings
1/8” or 1/4”
1/4”
1/4” or 3/8”
1/8” or 1/4”
1/4”
1/4” or 3/8”
Weight
500 gm
(1.1 lb)
954 gm
(2.1 lb)
2.77 kg
(5.0 lb)
454 gm
(1.0 lb)
907 gm
(2.0 lb)
2.15 kg
(4.75 lb)
*See specifications table for
model-specific limits.
Consult our applications specialists with any questions.
Tylan is a registered trademark of Mykrolis Corporation.
Mykrolis and the Mykrolis logo are trademarks of Mykrolis Corporation.
Kalrez and Viton are trademarks of DuPont Dow Elastomers, L.L.C.
Swagelok is a trademark of Crawford Fitting Company.
VCO and VCR are trademarks of Cajon Company.
Legal/Trademarks: www.mykrolis.com/corporate.nsf/docs/legal
Worldwide Offices: www.mykrolis.com/corporate.nsf/docs/worldwide
UNITED STATES OF AMERICA
(+1) 978-436-6500 Billerica, MA
(+1) 972-359-4000 Allen, TX
Lit. No. PF1062ENUS Rev. A 18 April 2003
Printed in the U.S.A. 1998-2003 Mykrolis Corporation. All rights reserved.
JAPAN
(+81) 3-5442-9718 Tokyo
(+81) 92-471-8133 Kyushu
(+81) 6-6390-0594 Osaka
EUROPE
(+33) 4-76-35-73-50
ASIA
(+65) 6 745-2422
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